Nanofabrication: Principles, Capabilities and Limits presents a one-stop
description at the introduction level on most of the technologies that have
been developed which are capable of making structures below 100nm. The
nanofabrication technologies covered in the book include photon-based
lithography, charged particle beams lithography, nanofabrication using scanning
probes, nanoreplications, nanoscale pattern transfer, nanofabrication by
molecular assembly and various indirect nanofabrication techniques. Principles
of each technology are introduced and illustrated with minimum mathematics
involved. The capabilities of each technology in making sub-100nm structures
are described. The limits of preventing a technology from further going down
the dimensional scale are analyzed. This book serves as a practical guide and
first hand reference for researchers and practitioners working in nanostructure
fabrication and also provides a tool box of various techniques that can be
easily adapted in different fields of applications.
